Top-Down Design of MEMS
نویسنده
چکیده
A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.
منابع مشابه
NODAS 1.3 - Nodal Design Of Actuators And Sensors
A circuit-level methodology for top-down hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. An abstract layout view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. Suspended-MEMS inertial sensors, resonant actuators and filters are designed using a small set of ge...
متن کاملRF MEMS Extended Tuning Range Varactor and Varactor Based True Time Delay Line Design
MEMS varactors are one of the important passive MEMS devices. Their applications include use in VCOs, tunable impedance matching networks, tunable filters, phase shifters, and true time delay lines. The shunt capacitive structure has been employed in most of the conventional MEMS varactor designs because of its simplicity. However, the capacitance ratio of this conventional shunt capacitive MEM...
متن کاملTitle: Smart MEMS and Sensor Systems 1: Cogent sensing and intelligent applications
This tutorial is the first presented by the authors of Smart MEMS and Sensor Systems (2006, Imperial College Press). The aim of the tutorial is to present the directions of research, development and technological evolution for Electro Mechanical Microsystems, and in particular microsensors. The development of MEMS devices has generally followed a bottom up methodology, reaching now a stage wher...
متن کاملReliability of Microelectromechanical Systems (MEMS)
Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues. This “evolutionary” partitioning of microsystems has led to long incubation t...
متن کاملIntegrated Modeling of Optical MEMS Subsystems
Optical MEMS subsystems are complex compositions of varied components that can include optical fibers, freespace and guided wave optics, drive electronics, control systems, MEMS chips, and packaging. Good engineering practice requires that each of these components be designed with the system application in mind. In general, there are two approaches to the design of complex integrated systems. T...
متن کامل